Rene Hubner: Advanced Ta-Based Diffusion Barriers for Cu Interconnects

Advanced Ta-Based Diffusion Barriers for Cu Interconnects



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Author: Rene Hubner
Number of Pages: 102 pages
Published Date: 17 Mar 2009
Publisher: Nova Science Publishers Inc
Publication Country: New York, United States
Language: English
ISBN: 9781604564518
Download Link: Click Here
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